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Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride

Robson, J. I. ORCID:, Gohar, L. K., Hurley, M. D., Shine, K. P. ORCID: and Wallington, T. J. (2006) Revised IR spectrum, radiative efficiency and global warming potential of nitrogen trifluoride. Geophysical Research Letters, 33 (10).

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To link to this item DOI: 10.1029/2006GL026210


Nitrogen trifluoride (NF3) is an industrial gas used in the semiconductor industry as a plasma etchant and chamber cleaning gas. NF3 is an alternative to other potent greenhouse gases and its usage has increased markedly over the last decade. In recognition of its increased relevance and to aid planning of future usage we report an updated radiative efficiency and global warming potentials for NF3. Laboratory measurements give an integrated absorption cross section of 7.04 x 10(-17) cm(2) molecule(-1) cm(-1) over the spectral region 200 2000 cm(-1). The radiative efficiency is calculated to be 0.21 Wm(-2) ppbv(-1) and the 100 year GWP, relative to carbon dioxide, is 17200. These values are approximately 60% higher than previously published estimates, primarily reflecting the higher infrared absorption cross-sections reported here.

Item Type:Article
Divisions:Science > School of Mathematical, Physical and Computational Sciences > Department of Meteorology
ID Code:5497
Uncontrolled Keywords:HALOCARBONS
Additional Information:L10817

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