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Digital signal processing of optical monitoring by means of a Kalman filter

Nixon, M. and Seeley, J.S. (1983) Digital signal processing of optical monitoring by means of a Kalman filter. In: Jacobsson, R.J. (ed.) Thin film technologies I. Proceedings of SPIE (401). SPIE, pp. 93-99. ISBN 9780892524365

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Abstract/Summary

A Kalman filter algorithm has been applied to interpret the optical reflectance excursions during vacuum deposition of infrared coatings and multilayer thin-film filters. The application has been described in detail elsewhere and this paper now reports on-line experience for estimating deposition rate and thickness. The estimation proved sufficiently reliable to firstly 'navigate' regular manufacture (as controlled by a skilled operator) and to subsequently reproduce the skill without interpretation or intervention whilst maintaining exemplary product quality. Optical control by means of this Kalman filter application is therefore considered suitable as a basis for the automated manufacture of infrared coatings and multilayer thin-film filters.

Item Type:Book or Report Section
Refereed:Yes
Divisions:Faculty of Science > School of Systems Engineering
ID Code:17931
Publisher:SPIE

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