Abstract/Summary

This invention relates to the manufacture of coated substrates, and particularly, but not exclusively, to the deposition of multi-layer coatings in the manufacture of interference filters consisting of multiple thin films. An object of the invention is to allow accurate control of the deposition of a succession of layers having good uniformity, for example during the manufacture by vacuum evaporation of multilayer interference filters for use with infrared radiation of particularly long wavelength, using a method which is self calibrating and which avoids the repetitive use of individual control layers.