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Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies

Digby, J.W., McIntosh, C.E., Parkhurst, G.M., Towlson, B.M., Hadjiloucas, S. ORCID:, Bowen, J. W., Chamberlain, J.M., Pollard, R.D., Miles, R.E., Steenson, D.P., Karatzas, L.S., Cronin, N.J. and Davies, S.R. (2000) Fabrication and characterization of micromachined rectangular waveguide components for use at millimeter-wave and terahertz frequencies. IEEE Transactions on Microwave Theory and Techniques, 48 (8). pp. 1293-1302. ISSN 0018-9480

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To link to this item DOI: 10.1109/22.859472


The fabrication and characterization of micromachined reduced-height air-filled rectangular waveguide components suitable for integration is reported in this paper. The lithographic technique used permits structures with heights of up to 100 μm to be successfully constructed in a repeatable manner. Waveguide S-parameter measurements at frequencies between 75-110 GHz using a vector network analyzer demonstrate low loss propagation in the TE10 mode reaching 0.2 dB per wavelength. Scanning electron microscope photographs of conventional and micromachined waveguides show that the fabrication technique can provide a superior surface finish than possible with commercially available components. In order to circumvent problems in efficiently coupling free-space propagating beams to the reduced-height G-band waveguides, as well as to characterize them using quasi-optical techniques, a novel integrated micromachined slotted horn antenna has been designed and fabricated, E-, H-, and D-plane far-field antenna pattern measurements at different frequencies using a quasi-optical setup show that the fabricated structures are optimized for 180-GHz operation with an E-plane half-power beamwidth of 32° elevated 35° above the substrate, a symmetrical H-plane pattern with a half-power beamwidth of 23° and a maximum D-plane cross-polar level of -33 dB. Far-field pattern simulations using HFSS show good agreement with experimental results.

Item Type:Article
Divisions:Life Sciences > School of Biological Sciences > Department of Bio-Engineering
ID Code:18895
Uncontrolled Keywords:75 to 110 GHz, E-plane half-power beamwidth, G-band waveguides, S-parameter measurements, TE10 mode, far-field antenna pattern measurements, free-space propagating beams, half-power beamwidth, lithographic technique, low loss propagation, maximum D-plane cross-polar level, micromachined rectangular waveguide components, millimeter-wave frequencies, quasi-optical techniques, reduced-height air-filled rectangular waveguide components, scanning electron microscope photographs, slotted horn antenna, surface finish, symmetrical H-plane pattern, terahertz frequencies, vector network analyzer

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